Polymer or resist pattern, and metal film pattern, metal pattern and plastic mold using the same, and fabrication methods thereof중합체 또는 레지스트 패턴, 및 금속 막 패턴, 금속 패턴 및 동일한 것을 사용한 플라스틱 주형과 이의 제조 방법
A method of fabricating a polymer or resist pattern over a substrate includes coating a photosensitive polymer or resist over the substrate to form a polymer or resist layer, determining a portion of the polymer or resist layer to be exposed to light, placing a light adjusting layer in an optical path of light shone on the polymer or resist layer, and adjusting the light adjusting layer to adjust a direction or intensity of the light shone on the polymer or resist layer. Based on the method, it is easy to fabricate a polymer or resist pattern, a metal film pattern, metal pattern structure, and a polymer mold, each having three-dimensional structures with various slopes or shapes by adjusting a direction or intensity of incident light when performing a lithography process.