Flexible Pressure Sensors Based on Three-dimensional Structure for High Sensitivity

Abstract

The importance of flexible polymer-based pressure sensors is growing in fields like healthcare monitoring, tactile recognition,gesture recognition, human-machine interface, and robot skin. In particular, health monitoring and tactile devices require high sensor sensitivity. Researchers have worked on sensor material and structure to achieve high sensitivity. A simple and effective method has been to employ three-dimensional pressure sensors. Three-dimensional (3D) structures dramatically increase sensor sensitivity by achieving larger local deformations for the same pressure. In this paper, the performance, manufacturing method, material, and structure of high-sensitivity flexible pressure sensors based on 3D structures, are reviewed.