Green Laser Annealing을 활용한 Monolithic 3D Integration 상부 PMOS 소자 구현과 성능 향상에 대한 연구A Study on the top-tier PMOS fabrication and Performance Improvement of Monolithic 3D Integration Using Green Laser Annealing
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박영근 | ko |
| dc.contributor.author | 노세민 | ko |
| dc.contributor.author | 정재중 | ko |
| dc.contributor.author | 신재철 | ko |
| dc.contributor.author | 조병진 | ko |
| dc.date.accessioned | 2022-11-22T01:02:03Z | - |
| dc.date.available | 2022-11-22T01:02:03Z | - |
| dc.date.created | 2022-11-18 | - |
| dc.date.issued | 2022-01-26 | - |
| dc.identifier.citation | 제29회 한국반도체학술대회 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/300388 | - |
| dc.language | Korean | - |
| dc.publisher | 연세대학교, 한국반도체산업협회, 한국반도체연구조합 | - |
| dc.title | Green Laser Annealing을 활용한 Monolithic 3D Integration 상부 PMOS 소자 구현과 성능 향상에 대한 연구 | - |
| dc.title.alternative | A Study on the top-tier PMOS fabrication and Performance Improvement of Monolithic 3D Integration Using Green Laser Annealing | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | 제29회 한국반도체학술대회 | - |
| dc.identifier.conferencecountry | KO | - |
| dc.identifier.conferencelocation | 강원도 하이원 그랜드호텔 | - |
| dc.contributor.localauthor | 조병진 | - |
| dc.contributor.nonIdAuthor | 박영근 | - |
| dc.contributor.nonIdAuthor | 노세민 | - |
| dc.contributor.nonIdAuthor | 정재중 | - |
| dc.contributor.nonIdAuthor | 신재철 | - |
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