A Thin, Transparent Encapsulation Film with Excellent Gap-filling Performance for Ultra-High-Resolution OLEDs via Vapor-phase Deposited Polymeric Layer

Abstract

A thin polymer film was developed by vapor-phase deposition method, termed initiated chemical vapor deposition (iCVD) that can replace the inkjet process. The thin polymer film was integrated together with the PECVD SiNx layers to form a high- performance thinfilm encapsulation (TFE) layer for ultra-high- resolution OLEDs, featured by excellent gap-filling properties, full transparency in whole visible light region, and minimal shadow effect.