Fabrication and Characterization of Ferroelectric Hafnium Oxide Thin Film
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Jeong, yujin | ko |
| dc.contributor.author | Sung, Sanghyeon | ko |
| dc.contributor.author | Lee, Keon Jae | ko |
| dc.date.accessioned | 2022-07-26T08:32:32Z | - |
| dc.date.available | 2022-07-26T08:32:32Z | - |
| dc.date.created | 2022-06-09 | - |
| dc.date.issued | 2022-05-10 | - |
| dc.identifier.citation | 2022 MRS SPRING MEETING & EXHIBIT | - |
| dc.identifier.uri | http://hdl.handle.net/10203/297549 | - |
| dc.language | English | - |
| dc.publisher | Materials Research Society | - |
| dc.title | Fabrication and Characterization of Ferroelectric Hafnium Oxide Thin Film | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | 2022 MRS SPRING MEETING & EXHIBIT | - |
| dc.identifier.conferencecountry | US | - |
| dc.identifier.conferencelocation | Honolulu, HI | - |
| dc.contributor.localauthor | Lee, Keon Jae | - |
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