Simple and practical methods for utilizing parylene C film based on vertical deposition and laser patterning

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dc.contributor.authorSim, Jee Hoonko
dc.contributor.authorChae, Hyeonwookko
dc.contributor.authorKim, Su-Bonko
dc.contributor.authorYoo, Seunghyupko
dc.date.accessioned2022-06-27T07:01:17Z-
dc.date.available2022-06-27T07:01:17Z-
dc.date.created2022-06-27-
dc.date.created2022-06-27-
dc.date.created2022-06-27-
dc.date.created2022-06-27-
dc.date.created2022-06-27-
dc.date.issued2022-06-
dc.identifier.citationSCIENTIFIC REPORTS, v.12, no.1-
dc.identifier.issn2045-2322-
dc.identifier.urihttp://hdl.handle.net/10203/297089-
dc.description.abstractWe propose two novel methods to effectively utilize parylene C films. First, we demonstrate a vertical deposition method capable of depositing a parylene C film of the same thickness on both sides of a sample. Through this method, we have formed parylene C films with a thickness of 4 mu m on both sides of the sample with a thickness deviation of less than 2.5%. Further optical verification indicates that parylene C films formed by this method have a very uniform thickness distribution on each side of the surfaces. Second, we propose a debris-tolerant laser patterning method as a mask-less means to fabricate self-supporting ultrathin parylene C films. This method does not involve any photolithography and entails a simple and rapid process that can be performed using only a few materials with excellent biocompatibility. It is demonstrated that patterned parylene C films exhibit a high degree of surface uniformity and have various geometrical shapes so that they can be used for substrates of highly flexible and/or stretchable devices. Finally, we use both of the proposed methods to fabricate flexible, stretchable, and waterproof-packaged bifacial blue LED modules to illustrate their potential in emerging applications that would benefit from such versatile form factors.-
dc.languageEnglish-
dc.publisherNATURE PORTFOLIO-
dc.titleSimple and practical methods for utilizing parylene C film based on vertical deposition and laser patterning-
dc.typeArticle-
dc.identifier.wosid000810147600061-
dc.identifier.scopusid2-s2.0-85131705099-
dc.type.rimsART-
dc.citation.volume12-
dc.citation.issue1-
dc.citation.publicationnameSCIENTIFIC REPORTS-
dc.identifier.doi10.1038/s41598-022-13080-w-
dc.contributor.localauthorYoo, Seunghyup-
dc.description.isOpenAccessN-
dc.type.journalArticleArticle-
dc.subject.keywordPlusTHIN-
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