DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | Lee, Hyun Joo Jenny | - |
dc.contributor.advisor | 이현주 | - |
dc.contributor.author | Kim, Yoo-Jeong | - |
dc.date.accessioned | 2022-04-27T19:31:33Z | - |
dc.date.available | 2022-04-27T19:31:33Z | - |
dc.date.issued | 2021 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=963425&flag=dissertation | en_US |
dc.identifier.uri | http://hdl.handle.net/10203/296044 | - |
dc.description | 학위논문(석사) - 한국과학기술원 : 전기및전자공학부, 2021.8,[iii, 29 p. :] | - |
dc.description.abstract | Gas detection systems are used in various fields such as environmental monitoring, medical and health care, and industries. In particular, miniaturized and accurate Micromachined Electrical Mechanical System (MEMS) gas sensors have been developed to apply the sensor to such various field. Among MEMS gas sensors, Capacitive Micromachined Ultrasonic Transducer (CMUT) which senses gas by direct mass detection methods has advantages such as higher quality factors. In this paper, a design to improve the mass sensitivity of CMUT is considered, and validate the device performance through the simulation. A CNUT device with a diameter of fewer than several microns has been proposed to improve sensitivity, however it is expensive to manufacture using conventional photolithography techniques. Therefore, we develop a new process by introducing nanosphere lithography processs to fabricate the designed CNUT devices. It is possible to fabricate the CNUT of radius less than sub-micron with low cost. | - |
dc.language | eng | - |
dc.publisher | 한국과학기술원 | - |
dc.subject | Capacitive Micromachined Ultrasonic Transducer (CMUT)▼aMEMS▼aHigh sensitivity▼aNanosphere lithography▼aGas sensor | - |
dc.subject | 정전용량형 미세가공 초음파 트랜스듀서 (CMUT)▼aMEMS▼a기체 검출기▼a고민감도▼a나노스피어리소그래피 | - |
dc.title | Design and fabrication of high sensitivity nanomechanical resonant gas sensors using nanosphere lithography | - |
dc.title.alternative | 나노스피어리소그래피를 이용한 고민감도의 나노 공진 기체 검출기 설계 및 공정 | - |
dc.type | Thesis(Master) | - |
dc.identifier.CNRN | 325007 | - |
dc.description.department | 한국과학기술원 :전기및전자공학부, | - |
dc.contributor.alternativeauthor | 김유정 | - |
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