Micro-LED integrated transparent ECoG micro electrode array

Abstract

In this work, I developed SU-8 based device system that combines micro-LED arrays with micro ECoG array for simultaneous light stimulation and neural signal recording. The integrated Opto-ECoG array is comprised of 16 Au nanonetwork transparent electrodes and 8 micro-LEDs are fixed in patterned SU-8 hole structure over the ECoG array. That point these two parts do not need to be aligned with any alignment tools is important. This is because micro LED array is fabricated on the micro recording array vertically. This integrated structure also solves the problem of photoelectric artifacts because it is fabricated as a transparent structure using electrospinning. Additionally, Electrochemical characteristic of the device was examined by measuring electrochemical impedance. During the micro-LED stimulates the cortex, in-vivo experiments were performed to investigate the efficacy of proposed device in a rat for neuroscience studies.