학위논문(석사) - 한국과학기술원 : 기계공학과, 2021.8,[iv, 29 p. :]
Thin film▼aMechanical characterization technique▼aPassivation▼aPlastic deformation; 박막▼a기계적 물성 측정법▼a절연 코팅▼a소성 변형
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