DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | Sohn, Hoon | - |
dc.contributor.advisor | 손훈 | - |
dc.contributor.author | Yi, Kiyoon | - |
dc.date.accessioned | 2022-04-15T07:56:39Z | - |
dc.date.available | 2022-04-15T07:56:39Z | - |
dc.date.issued | 2021 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=948349&flag=dissertation | en_US |
dc.identifier.uri | http://hdl.handle.net/10203/294861 | - |
dc.description | 학위논문(석사) - 한국과학기술원 : 건설및환경공학과, 2021.2,[iii, 35 p. :] | - |
dc.description.abstract | In this study, a femtosecond laser-based ultrasonic inspection technique for a moving object is developed in a pump-probe setup. A pump laser pulse generates ultrafast ultrasound up to THz in the moving object, and a probe laser pulse reflected by the deformed object is used for detecting the pump induced ultrafast ultrasound. The detection is based on reflectometry with an iris partially blocking the reflected probe beam. The developed technique owns advantages that the femtosecond laser enables an ultra-short contact time with the moving object and minimizes distortion of the measured ultrasound. This research has validated that almost identical ultrasound can be acquired from the moving object compared to a stationary condition in both the pulse-echo and pitch-catch modes. The feasibility of the developed technique for nondestructive evaluation of the moving object has been demonstrated by thickness estimation of a sub-micron layer deposited on a silicon wafer. | - |
dc.language | eng | - |
dc.publisher | 한국과학기술원 | - |
dc.subject | femtosecond laser▼aultrafast ultrasonic▼areflectometry▼amoving object inspection▼acoating thickness▼asilicon wafer | - |
dc.subject | 펨토초 레이저▼a초고속 초음파▼a반사측정기법▼a이동 물체 검사▼a박막 두께 측정▼a실리콘 웨이퍼 | - |
dc.title | Development of a femtosecond laser-based ultrasonic inspection technique for moving object and its application | - |
dc.title.alternative | 펨토초 레이저를 이용한 이동물체의 초음파 검사기술 개발 및 적용 | - |
dc.type | Thesis(Master) | - |
dc.identifier.CNRN | 325007 | - |
dc.description.department | 한국과학기술원 :건설및환경공학과, | - |
dc.contributor.alternativeauthor | 이기윤 | - |
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