METHOD FOR MANUFACTURING TRANSITION METAL CHALCOGENIDE AND TRANSITION METAL CHALCOGENIDE PREPARED THEREBY전이금속 칼코게나이드 제조방법 및 이에 의하여 제조된 전이금속 칼코게나이드

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dc.contributor.authorChoi, Sung-Yoolko
dc.contributor.authorHong, Woonggiko
dc.contributor.authorShim, Gi Woongko
dc.date.accessioned2022-04-15T07:03:49Z-
dc.date.available2022-04-15T07:03:49Z-
dc.identifier.urihttp://hdl.handle.net/10203/294831-
dc.description.abstractThe present disclosure provides a method for preparing a transition metal chalcogenide including: a step of forming a transition metal chalcogenide thin film; and a step of controlling the defects of the transition metal chalcogenide thin film by injecting a processing gas including oxygen and nitrogen to the formed transition metal chalcogenide thin film.-
dc.titleMETHOD FOR MANUFACTURING TRANSITION METAL CHALCOGENIDE AND TRANSITION METAL CHALCOGENIDE PREPARED THEREBY-
dc.title.alternative전이금속 칼코게나이드 제조방법 및 이에 의하여 제조된 전이금속 칼코게나이드-
dc.typePatent-
dc.type.rimsPAT-
dc.contributor.localauthorChoi, Sung-Yool-
dc.contributor.nonIdAuthorHong, Woonggi-
dc.contributor.assigneeKAIST-
dc.identifier.iprsType특허-
dc.identifier.patentApplicationNumber16925674-
dc.identifier.patentRegistrationNumber11268210-
dc.date.application2020-07-10-
dc.date.registration2022-03-08-
dc.publisher.countryUS-
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EE-Patent(특허)
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