DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, Chungha | ko |
dc.contributor.author | Baek, Yoonseok | ko |
dc.contributor.author | Hugonnet, Herve | ko |
dc.contributor.author | Park, YongKeun | ko |
dc.date.accessioned | 2022-04-14T06:44:17Z | - |
dc.date.available | 2022-04-14T06:44:17Z | - |
dc.date.created | 2022-03-21 | - |
dc.date.created | 2022-03-21 | - |
dc.date.created | 2022-03-21 | - |
dc.date.created | 2022-03-21 | - |
dc.date.issued | 2022-03 | - |
dc.identifier.citation | OPTICS LETTERS, v.47, no.5, pp.1025 - 1028 | - |
dc.identifier.issn | 0146-9592 | - |
dc.identifier.uri | http://hdl.handle.net/10203/292763 | - |
dc.description.abstract | Surface topology measurements of micro- or nanostructures are essential for both scientific and industrial applications. However, high-throughput measurements remain challenging in surface metrology. We present single-shot full-field surface topography measurement using Kramers-Kronig holographic imaging and spectral multiplexing. Three different intensity images at different incident angles were simultaneously measured with three different colors, from which a quantitative phase image was retrieved using spatial Kramers-Kronig relations. A high-resolution topographic image of the sample was then reconstructed using synthetic aperture holography. Various patterned structures at the nanometer scale were measured and cross-validated using atomic force microscopy. (C) 2022 Optica Publishing Group | - |
dc.language | English | - |
dc.publisher | OPTICAL SOC AMER | - |
dc.title | Single-shot wide-field topography measurement using spectrally multiplexed reflection intensity holography via space-domain Kramers-Kronig relations | - |
dc.type | Article | - |
dc.identifier.wosid | 000762499000004 | - |
dc.identifier.scopusid | 2-s2.0-85125205792 | - |
dc.type.rims | ART | - |
dc.citation.volume | 47 | - |
dc.citation.issue | 5 | - |
dc.citation.beginningpage | 1025 | - |
dc.citation.endingpage | 1028 | - |
dc.citation.publicationname | OPTICS LETTERS | - |
dc.identifier.doi | 10.1364/OL.446159 | - |
dc.contributor.localauthor | Park, YongKeun | - |
dc.contributor.nonIdAuthor | Baek, Yoonseok | - |
dc.description.isOpenAccess | N | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | DIGITAL HOLOGRAPHY | - |
dc.subject.keywordPlus | SURFACE-TOPOGRAPHY | - |
dc.subject.keywordPlus | MICROSCOPY | - |
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