Fabrication of photonic crystals by holographic lithography홀로그래피 식각공정을 이용한 광결정의 제조

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Advisors
Yang, Seung-Manresearcher양승만researcher
Description
한국과학기술원 : 생명화학공학과,
Publisher
한국과학기술원
Issue Date
2005
Identifier
244869/325007  / 020015108
Language
eng
Description

학위논문(박사) - 한국과학기술원 : 생명화학공학과, 2005.2, [ viii, 110 p. ]

Keywords

soft-lithography; photonic crystals; interference pattern; Holographic lithography; chemical vapor deposition; 화학기상증착; 연성식각; 광결정; 간섭 무늬; 홀로그래피 식각

URI
http://hdl.handle.net/10203/28950
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=244869&flag=dissertation
Appears in Collection
CBE-Theses_Ph.D.(박사논문)
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