DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | Jung, Hee-Tae | - |
dc.contributor.advisor | 정희태 | - |
dc.contributor.author | Kang, Hohyung | - |
dc.date.accessioned | 2021-05-13T19:41:59Z | - |
dc.date.available | 2021-05-13T19:41:59Z | - |
dc.date.issued | 2020 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=947908&flag=dissertation | en_US |
dc.identifier.uri | http://hdl.handle.net/10203/285205 | - |
dc.description | 학위논문(석사) - 한국과학기술원 : 생명화학공학과, 2020.2,[iii, 23p :] | - |
dc.description.abstract | Electric nose (E-nose), an artificial sense system that mimics the human olfactory system using a multi-array sensor system, is key technology of high-performance gas detection. However, since design and fabrication of multi-array sensing channel have been significantly limited with time-consuming and non-universal process, development of commercializable and high-throughput top-down fabrication approaches is critically required. Here, for the first time, commercializable high-resolution top-down lithography is developed for E-nose fabrication. Five different metal oxide semiconductor (MOS) nanopattern channels ($NiO, CuO, Cr_{2}O_{3}, SnO_{2}, WO_{3}$) were fabricated into multi-array sensors by unique lithographic approach, that utilize the sputtering of the metals’ grains by low-energy bombardment of the plasma. The nanopattern channels shows i) high-resolution (15 nm scale), ii) high-aspect-ratio (11 | - |
dc.description.abstract | width: 14 nm height: 150 nm) and iii) ultra-small grains (5.1 nm) with high uniformity in cm2 scale, leading to high sensitivity for each target analytes. Our E-nose system composed of five MOS nanopattern channels could successfully distinguish seven different hazard analytes including volatile organic compounds (VOCs | - |
dc.description.abstract | $C_{7}H_{8}, C_{2}H_{5}OH, CH_{3}COCH_{3}, C_{6}H_{14}, C_{3}H_{6}O$) and nitrogen containing compounds ($NO$ and $NH_3$) were successfully distinguished. It is expected that this unique top-down lithography can provide a simple and reliable approach for channel diversification and high-resolution channel fabrication in commercial level and e-nose would have further applications in real life situation. | - |
dc.language | eng | - |
dc.publisher | 한국과학기술원 | - |
dc.subject | Gas sensor | - |
dc.subject | electronic nose (e-nose) | - |
dc.subject | nanolithography | - |
dc.subject | multi-array | - |
dc.subject | volatile organic compounds | - |
dc.subject | principal components analysis (PCA) | - |
dc.subject | 가스 센서 | - |
dc.subject | 전자코 | - |
dc.subject | 나노리소그래피 | - |
dc.subject | 다중 채널 | - |
dc.subject | 휘발성 유기 화합물 | - |
dc.subject | 주성분 분석 | - |
dc.title | Development of nanopatterned multi-array electronic-nose (E-Nose) by top-down lithography | - |
dc.title.alternative | 하향식 리소그래피를 이용한 나노패턴기반 다중채널 전자코 개발에 관한 연구 | - |
dc.type | Thesis(Master) | - |
dc.identifier.CNRN | 325007 | - |
dc.description.department | 한국과학기술원 :생명화학공학과, | - |
dc.contributor.alternativeauthor | 강호형 | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.