학위논문(석사) - 한국과학기술원 : 전기및전자공학부, 2020.2,[ix, 34 p. :]
DRAM 셀 커패시터▼a원자층 증착 공법▼a$Hf_xZr$yO_2$▼aTiN 전극▼aWN 전극; DRAM cell capacitor▼aAtomic Layer Depositio; $Hf_xZr$yO_2$▼aTiN electrode▼aWN electrode
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