Laser scanned MEMS modules for variable structured illumination

Abstract

MEMS driven microscanners have accelerated the size reduction of an optical device by using compact, high speed, and low cost MEMS scanners. MEMS laser scanners have been applied to a variety of miniaturized optical imaging devices including pico-projector, head-up display (HUD), and LIDAR system. MEMS laser scanners have been also applied for bio-optic imaging application such as endomicroscope, 3D camera, and face recognition. MEMS laser scanner enables wearable or handheld bio-optical imaging device with small dimension and low power consumption. Especially, Lissajous MEMS scanner provides uniform illumination, and quick preview with high mechanical stability. This study presents Lissajous scanned MEMS modules for variable structured illumination. Lissajous MEMS fiber scanning module and Lissajous MEMS mirror scanning module are demonstrated, and variable structured illumination for high resolution 3D imaging is also demonstrated using Lissajous scanning module. Variable structured illumination provides various field-of-view and patterns, and high resolution 3D images of various object are obtained. The proposed Lissajous scanned MEMS modules will provide a new direction for the assorted miniaturized bio-optical imaging system.