학위논문(박사) - 한국과학기술원 : 전기및전자공학부, 2020.2,[vii, 81 p. :]
Atomic layer deposition▼aNickel▼aNickel-germanide▼aWorkfunction▼aSpecific contact resistivity▼aImplantation after germanidation▼aSchottky barrier height▼aLogic device▼aMemory device; 원자층 증착 방법▼a니켈▼a니켈-저마나이드▼a일함수▼a접촉 비저항▼a쇼트키 장벽▼a로직 소자▼a메모리 소자
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