학위논문(박사) - 한국과학기술원 : 전기및전자공학부, 2019.8,[viii, 84 p. :]
Self-aligned double patterning (SADP)▼aunidirectional layout▼awire widening▼awire width optimization▼aredundant via insertion▼aintegrated routing and dummy fill; 자기정렬 이중 패터닝▼a와이어 와이드닝▼a리던던트 비아▼a인테그레이티드 라우팅 및 더미 삽입
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