학위논문(석사) - 한국과학기술원 : 생명화학공학과, 2019.8,[iv, 42 p :]
block copolymer(BCP)▼aperpendicular structure▼aneutral layer▼atop coat▼anano pattern▼ainitiated chemical vapor deposition(iCVD); 블록공중합체▼a수직 배향 구조▼a중성층▼a탑 코트▼a나노 패턴▼a개시제를 이용한 화학 기상 증착
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