Fabrication of annular photonic crystals by atomic layer deposition and sacrificial etching

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dc.contributor.authorFeng, Junboko
dc.contributor.authorChen, Yaoko
dc.contributor.authorBlair, Johnko
dc.contributor.authorKurt, Hamzako
dc.contributor.authorHao, Ranko
dc.contributor.authorCitrin, D. S.ko
dc.contributor.authorSummers, Christopher J.ko
dc.contributor.authorZhou, Zhipingko
dc.date.accessioned2021-04-27T01:31:19Z-
dc.date.available2021-04-27T01:31:19Z-
dc.date.created2021-04-27-
dc.date.created2021-04-27-
dc.date.created2021-04-27-
dc.date.issued2009-03-
dc.identifier.citationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.27, no.2, pp.568 - 572-
dc.identifier.issn1071-1023-
dc.identifier.urihttp://hdl.handle.net/10203/282644-
dc.description.abstractIn this article, the fabrication process of annular photonic crystals on silicon-on-insulator wafers was addressed for the first time. A self-alignment procedure for nanofabrication using atomic layer deposition and sacrificial etching was established to place accurately nanosized dielectric rods in nanosized circular air holes. Avoiding the challenging electron-beam lithography alignment, this method achieves atomic level precision and shows high stability. (C) 2009 American Vacuum Society. [DO]: 10.1116/1.3079662]-
dc.languageEnglish-
dc.publisherA V S AMER INST PHYSICS-
dc.titleFabrication of annular photonic crystals by atomic layer deposition and sacrificial etching-
dc.typeArticle-
dc.identifier.wosid000265839400004-
dc.identifier.scopusid2-s2.0-64549127418-
dc.type.rimsART-
dc.citation.volume27-
dc.citation.issue2-
dc.citation.beginningpage568-
dc.citation.endingpage572-
dc.citation.publicationnameJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B-
dc.identifier.doi10.1116/1.3079662-
dc.contributor.localauthorKurt, Hamza-
dc.contributor.nonIdAuthorFeng, Junbo-
dc.contributor.nonIdAuthorChen, Yao-
dc.contributor.nonIdAuthorBlair, John-
dc.contributor.nonIdAuthorHao, Ran-
dc.contributor.nonIdAuthorCitrin, D. S.-
dc.contributor.nonIdAuthorSummers, Christopher J.-
dc.contributor.nonIdAuthorZhou, Zhiping-
dc.description.isOpenAccessN-
dc.type.journalArticleArticle-
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