DC Field | Value | Language |
---|---|---|
dc.contributor.author | Feng, Junbo | ko |
dc.contributor.author | Chen, Yao | ko |
dc.contributor.author | Blair, John | ko |
dc.contributor.author | Kurt, Hamza | ko |
dc.contributor.author | Hao, Ran | ko |
dc.contributor.author | Citrin, D. S. | ko |
dc.contributor.author | Summers, Christopher J. | ko |
dc.contributor.author | Zhou, Zhiping | ko |
dc.date.accessioned | 2021-04-27T01:31:19Z | - |
dc.date.available | 2021-04-27T01:31:19Z | - |
dc.date.created | 2021-04-27 | - |
dc.date.created | 2021-04-27 | - |
dc.date.created | 2021-04-27 | - |
dc.date.issued | 2009-03 | - |
dc.identifier.citation | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.27, no.2, pp.568 - 572 | - |
dc.identifier.issn | 1071-1023 | - |
dc.identifier.uri | http://hdl.handle.net/10203/282644 | - |
dc.description.abstract | In this article, the fabrication process of annular photonic crystals on silicon-on-insulator wafers was addressed for the first time. A self-alignment procedure for nanofabrication using atomic layer deposition and sacrificial etching was established to place accurately nanosized dielectric rods in nanosized circular air holes. Avoiding the challenging electron-beam lithography alignment, this method achieves atomic level precision and shows high stability. (C) 2009 American Vacuum Society. [DO]: 10.1116/1.3079662] | - |
dc.language | English | - |
dc.publisher | A V S AMER INST PHYSICS | - |
dc.title | Fabrication of annular photonic crystals by atomic layer deposition and sacrificial etching | - |
dc.type | Article | - |
dc.identifier.wosid | 000265839400004 | - |
dc.identifier.scopusid | 2-s2.0-64549127418 | - |
dc.type.rims | ART | - |
dc.citation.volume | 27 | - |
dc.citation.issue | 2 | - |
dc.citation.beginningpage | 568 | - |
dc.citation.endingpage | 572 | - |
dc.citation.publicationname | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | - |
dc.identifier.doi | 10.1116/1.3079662 | - |
dc.contributor.localauthor | Kurt, Hamza | - |
dc.contributor.nonIdAuthor | Feng, Junbo | - |
dc.contributor.nonIdAuthor | Chen, Yao | - |
dc.contributor.nonIdAuthor | Blair, John | - |
dc.contributor.nonIdAuthor | Hao, Ran | - |
dc.contributor.nonIdAuthor | Citrin, D. S. | - |
dc.contributor.nonIdAuthor | Summers, Christopher J. | - |
dc.contributor.nonIdAuthor | Zhou, Zhiping | - |
dc.description.isOpenAccess | N | - |
dc.type.journalArticle | Article | - |
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