Fabrication and microwave responses of YBa2Cu3O7-x, superconducting thin-film nanobridges

Abstract

Superconducting nanobridges with a width smaller than 150 nm were patterned by electrou beam/ultraviolet (EB/UV) hybrid exposure technique in TBa2Cu3O7-x (YBCO) thin films. There was no significant decrease in transition temperature and critical current density compared with unstructured films. For a 120-nm-wide nanobridge as high as 150 mu A critical current was obtained at 77 K. When microwave irradiation in the centimeter wavelength regime was applied, Shapiro steps in the current-voltage characteristics were observed at 77 K.