DC Field | Value | Language |
---|---|---|
dc.contributor.author | Park, Byung-Sun | ko |
dc.contributor.author | Lee, Jin-Hee | ko |
dc.contributor.author | Yoon, Hyung-Sup | ko |
dc.contributor.author | Park, Chul Soon | ko |
dc.contributor.author | Pyun, Kwang-Eui | ko |
dc.contributor.author | Kim, Il-Kwang | ko |
dc.date.accessioned | 2020-01-09T02:20:15Z | - |
dc.date.available | 2020-01-09T02:20:15Z | - |
dc.date.created | 2020-01-06 | - |
dc.date.issued | 1997-06 | - |
dc.identifier.citation | JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.30, pp.S140 - S142 | - |
dc.identifier.issn | 0374-4884 | - |
dc.identifier.uri | http://hdl.handle.net/10203/270994 | - |
dc.description.abstract | We propose a new optical lithographic technique to form 0.20 mu m length T-shaped gate for application to low noise high electron mobility transistor (HEMT). By using this technique, 0.20 mu m AlGaAs/InGaAs/GaAs pseudomorphic HEMT (PHEMT) was successfully fabricated. and the transconductance of 498 mS/mm and the cutoff frequency of 62.4 GHz were obtained, which are the best values ever reported for the HEMTs fabricated using optical lithography. | - |
dc.language | English | - |
dc.publisher | KOREAN PHYSICAL SOC | - |
dc.title | 0.20 mu m pseudomorphic HEMT device fabricated by PSM and self-aligned head T-shaped gate techniques | - |
dc.type | Article | - |
dc.identifier.wosid | A1997XJ37500028 | - |
dc.identifier.scopusid | 2-s2.0-0031480853 | - |
dc.type.rims | ART | - |
dc.citation.volume | 30 | - |
dc.citation.beginningpage | S140 | - |
dc.citation.endingpage | S142 | - |
dc.citation.publicationname | JOURNAL OF THE KOREAN PHYSICAL SOCIETY | - |
dc.contributor.localauthor | Park, Chul Soon | - |
dc.contributor.nonIdAuthor | Park, Byung-Sun | - |
dc.contributor.nonIdAuthor | Lee, Jin-Hee | - |
dc.contributor.nonIdAuthor | Yoon, Hyung-Sup | - |
dc.contributor.nonIdAuthor | Pyun, Kwang-Eui | - |
dc.contributor.nonIdAuthor | Kim, Il-Kwang | - |
dc.description.isOpenAccess | N | - |
dc.type.journalArticle | Article; Proceedings Paper | - |
dc.subject.keywordPlus | PHASE-SHIFTING MASK | - |
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