A nanometric displacement measurement method using the detection of fringe peak movement

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dc.contributor.authorYi, JHko
dc.contributor.authorKim, Soohyunko
dc.contributor.authorKwak, Yoon Keunko
dc.date.accessioned2008-01-08T06:15:38Z-
dc.date.available2008-01-08T06:15:38Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued2000-09-
dc.identifier.citationMEASUREMENT SCIENCE TECHNOLOGY, v.11, no.9, pp.1352 - 1358-
dc.identifier.issn0957-0233-
dc.identifier.urihttp://hdl.handle.net/10203/2657-
dc.description.abstractThis paper proposes a novel method for measuring nanometric displacement by detecting fringe movement of interferograms which is linearly proportional to the displacement of an object. Interferometers have been used for precision measurement of displacement, but they have such error sources as unequal gain of detectors, imbalance of beams and lack of quadrature. These error sources degrade the accuracy of the interferometer. However, the fringe movement of interferograms has little relation to these error sources. In order to investigate the performance of the proposed method, analyses and simulations of speckle noise, Gaussian noise and wavefront distortion were executed. Results of the simulations show that the proposed method is robust against these errors. Experiments were performed to verify this method.-
dc.description.sponsorshipThis work was supported in part by the Brain Korea 21 Project.en
dc.languageEnglish-
dc.language.isoen_USen
dc.publisherIOP PUBLISHING LTD-
dc.subjectINTERFEROMETRY-
dc.subjectACCURACY-
dc.titleA nanometric displacement measurement method using the detection of fringe peak movement-
dc.typeArticle-
dc.identifier.wosid000089344800015-
dc.identifier.scopusid2-s2.0-0034274719-
dc.type.rimsART-
dc.citation.volume11-
dc.citation.issue9-
dc.citation.beginningpage1352-
dc.citation.endingpage1358-
dc.citation.publicationnameMEASUREMENT SCIENCE TECHNOLOGY-
dc.embargo.liftdate9999-12-31-
dc.embargo.terms9999-12-31-
dc.contributor.localauthorKim, Soohyun-
dc.contributor.localauthorKwak, Yoon Keun-
dc.contributor.nonIdAuthorYi, JH-
dc.type.journalArticleArticle-
dc.subject.keywordAuthordisplacement-
dc.subject.keywordAuthorfringe peak-
dc.subject.keywordAuthorlaser interferometer-
dc.subject.keywordAuthorleast-square fitting-
dc.subject.keywordPlusINTERFEROMETRY-
dc.subject.keywordPlusACCURACY-
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