Microstructured Porous Pyramid-Based Ultrahigh Sensitive Pressure Sensor Insensitive to Strain and Temperature

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dc.contributor.authorYang, Jun Changko
dc.contributor.authorKim, Jin-Ohko
dc.contributor.authorOh, Jinwonko
dc.contributor.authorKwon, Se Youngko
dc.contributor.authorSim, Joo Yongko
dc.contributor.authorKim, Da Wonko
dc.contributor.authorChoi, Han Byulko
dc.contributor.authorPark, Steveko
dc.date.accessioned2019-06-24T08:50:19Z-
dc.date.available2019-06-24T08:50:19Z-
dc.date.created2019-06-24-
dc.date.created2019-06-24-
dc.date.issued2019-05-
dc.identifier.citationACS APPLIED MATERIALS & INTERFACES, v.11, no.21, pp.19472 - 19480-
dc.identifier.issn1944-8244-
dc.identifier.urihttp://hdl.handle.net/10203/262813-
dc.description.abstractAn ultrahigh sensitive capacitive pressure sensor based on a porous pyramid dielectric layer (PPDL) is reported. Compared to that of the conventional pyramid dielectric layer, the sensitivity was drastically increased to 44.5 kPa(-1) in the pressure range <100 Pa, an unprecedented sensitivity for capacitive pressure sensors. The enhanced sensitivity is attributed to a lower compressive modulus and larger change in an effective dielectric constant under pressure. By placing the pressure sensors on islands of hard elastomer embedded in a soft elastomer substrate, the sensors exhibited insensitivity to strain. The pressure sensors were also nonresponsive to temperature. Finally, a contact resistance-based pressure sensor is also demonstrated by chemically grafting PPDL with a conductive polymer, which also showed drastically enhanced sensitivity.-
dc.languageEnglish-
dc.publisherAMER CHEMICAL SOC-
dc.titleMicrostructured Porous Pyramid-Based Ultrahigh Sensitive Pressure Sensor Insensitive to Strain and Temperature-
dc.typeArticle-
dc.identifier.wosid000470034700064-
dc.identifier.scopusid2-s2.0-85066869471-
dc.type.rimsART-
dc.citation.volume11-
dc.citation.issue21-
dc.citation.beginningpage19472-
dc.citation.endingpage19480-
dc.citation.publicationnameACS APPLIED MATERIALS & INTERFACES-
dc.identifier.doi10.1021/acsami.9b03261-
dc.contributor.localauthorPark, Steve-
dc.contributor.nonIdAuthorOh, Jinwon-
dc.contributor.nonIdAuthorSim, Joo Yong-
dc.contributor.nonIdAuthorKim, Da Won-
dc.contributor.nonIdAuthorChoi, Han Byul-
dc.description.isOpenAccessN-
dc.type.journalArticleArticle-
dc.subject.keywordAuthore-skin-
dc.subject.keywordAuthorpressure sensor-
dc.subject.keywordAuthorstrain insensitive-
dc.subject.keywordAuthortemperature insensitive-
dc.subject.keywordAuthorporous pyramid-
dc.subject.keywordPlusWEARABLE PRESSURE-
dc.subject.keywordPlusELECTRONIC SKIN-
dc.subject.keywordPlusRUBBER-
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