Neural network classifier-based OPC with imbalanced training data

Abstract

Machine learning-guided optical proximity correction, called ML-OPC in this paper, has recently been proposed to alleviate long runtime of model-based OPC. ML-OPC using regression methods has been presented but with limited prediction accuracy. We propose NNC-OPC, in which a neural network classifier serves as a mask bias model. A few techniques are applied to enhance basic NNC-OPC: parameterization of layout segments using polar Fourier transform signals, dimensionality reduction through weighted principal component analysis, and sampling of training layout segments. Training segments are typically imbalanced over the range of mask biases, which may cause large prediction error for segments that appear less frequently. This is resolved by three techniques: synthetic data generation, class reorganization, and an adaptive learning rate. Experiments with NNC-OPC with all techniques applied indicate that prediction error of mask bias and training time are reduced by 29% and 80%, respectively, compared to state-of-the-art ML-OPC with regression methods.