반도체 웨이퍼상의 입자 침착속도의 측정 및 제어Measurement and control of particle deposition velocity on a semiconductor wafer surface
- Advisors
- 박승오researcher; Park, Seung-Oresearcher
- Description
- 한국과학기술원 : 항공우주공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1994
- Identifier
- 68983/325007 / 000855171
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 항공우주공학과, 1994.2, [ xiii, 109 p. ]
- Appears in Collection
- AE-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
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