Universal templates for nanostructure arrays using silicon-containing block copolymers
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Jo, Gyeong Cheon | ko |
| dc.contributor.author | Bak, Chang Hong | ko |
| dc.contributor.author | Kim, Jin-Baek | ko |
| dc.date.accessioned | 2019-04-16T02:10:57Z | - |
| dc.date.available | 2019-04-16T02:10:57Z | - |
| dc.date.created | 2014-01-10 | - |
| dc.date.issued | 2012-02-14 | - |
| dc.identifier.citation | 2012 Advanced lithography | - |
| dc.identifier.uri | http://hdl.handle.net/10203/259837 | - |
| dc.language | English | - |
| dc.publisher | SPIE Advanced Lithography | - |
| dc.title | Universal templates for nanostructure arrays using silicon-containing block copolymers | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | 2012 Advanced lithography | - |
| dc.identifier.conferencecountry | US | - |
| dc.contributor.localauthor | Kim, Jin-Baek | - |
| dc.contributor.nonIdAuthor | Jo, Gyeong Cheon | - |
| dc.contributor.nonIdAuthor | Bak, Chang Hong | - |
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