Large Area, Multi-Dimensional Nanopatterning through Phase Masks
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박준용 | ko |
| dc.contributor.author | 현가담 | ko |
| dc.contributor.author | 안창의 | ko |
| dc.contributor.author | 전석우 | ko |
| dc.date.accessioned | 2019-04-15T22:31:56Z | - |
| dc.date.available | 2019-04-15T22:31:56Z | - |
| dc.date.created | 2014-01-09 | - |
| dc.date.issued | 2013-04-10 | - |
| dc.identifier.citation | 제2회 차세대리소그래피 학술대회 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/258794 | - |
| dc.language | Korean | - |
| dc.publisher | 한국광학회 | - |
| dc.title | Large Area, Multi-Dimensional Nanopatterning through Phase Masks | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | 제2회 차세대리소그래피 학술대회 | - |
| dc.identifier.conferencecountry | KO | - |
| dc.contributor.localauthor | 전석우 | - |
| dc.contributor.nonIdAuthor | 박준용 | - |
| dc.contributor.nonIdAuthor | 현가담 | - |
| dc.contributor.nonIdAuthor | 안창의 | - |
- Appears in Collection
- MS-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.