Synthesis of lithographic test patterns through topology-oriented pattern extraction and classification
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Shim, Seongbo | ko |
| dc.contributor.author | CHUNG, WOOHYUN | ko |
| dc.contributor.author | Shin, Youngsoo | ko |
| dc.date.accessioned | 2019-04-15T15:55:14Z | - |
| dc.date.available | 2019-04-15T15:55:14Z | - |
| dc.date.created | 2014-11-26 | - |
| dc.date.issued | 2014-02-25 | - |
| dc.identifier.citation | SPIE Advanced Lithography, pp.1 - 10 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/255444 | - |
| dc.language | English | - |
| dc.publisher | SPIE | - |
| dc.title | Synthesis of lithographic test patterns through topology-oriented pattern extraction and classification | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 1 | - |
| dc.citation.endingpage | 10 | - |
| dc.citation.publicationname | SPIE Advanced Lithography | - |
| dc.identifier.conferencecountry | US | - |
| dc.identifier.conferencelocation | 미국 산호세 | - |
| dc.contributor.localauthor | Shin, Youngsoo | - |
- Appears in Collection
- EE-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.