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Results 1-1 of 1 (Search time: 0.006 seconds).

NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
Control of plasma parameters using grid voltage biasing and inert gas mixing in inductively coupled plasma = 유도결합 플라즈마에서 그리드 및 비활성 기체 혼합을 이용한 플라즈마 변수 제어link

Bai, Keun-Hee; 배근희; Chang, Hong-Young; 장홍영, 한국과학기술원, 2002

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