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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Research on characteristics of the low pressure and low density e-beam plasma and its application to etching process = 저압 저밀도 전자빔 플라즈마의 특성과 에칭 공정 응용에 대한 연구link Bae, In Shik; 배인식; Chang, Hong Young; 장홍영, 한국과학기술원, 2017 |
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