DC Field | Value | Language |
---|---|---|
dc.contributor.author | Jang, Seong Cheol | ko |
dc.contributor.author | Park, Jozeph | ko |
dc.contributor.author | Kim, Hyoung-Do | ko |
dc.contributor.author | Hong, Hyunmin | ko |
dc.contributor.author | Chung, Kwun-Bum | ko |
dc.contributor.author | Kim, Yong Joo | ko |
dc.contributor.author | Kim, Hyun-Suk | ko |
dc.date.accessioned | 2019-04-15T14:32:27Z | - |
dc.date.available | 2019-04-15T14:32:27Z | - |
dc.date.created | 2019-03-18 | - |
dc.date.created | 2019-03-18 | - |
dc.date.issued | 2019-02 | - |
dc.identifier.citation | AIP ADVANCES, v.9, no.2 | - |
dc.identifier.issn | 2158-3226 | - |
dc.identifier.uri | http://hdl.handle.net/10203/254148 | - |
dc.description.abstract | In-Ga-Zn-O (IGZO) films deposited by sputtering process generally require thermal annealing above 300 degrees C to achieve satisfactory semiconductor properties. In this work, microwave and e-beam radiation are adopted at room temperature as alternative activation methods. Thin film transistors (TFTs) based on IGZO semiconductors that have been subjected to microwave and e-beam processes exhibit electrical properties similar to those of thermally annealed devices. However spectroscopic ellipsometry analyses indicate that e-beam radiation may have caused structural damage in IGZO, thus compromising the device stability under bias stress. (c) 2019 Author(s). | - |
dc.language | English | - |
dc.publisher | AMER INST PHYSICS | - |
dc.title | Low temperature activation of amorphous In-Ga-Zn-O semiconductors using microwave and e-beam radiation, and the associated thin film transistor properties | - |
dc.type | Article | - |
dc.identifier.wosid | 000460029500067 | - |
dc.identifier.scopusid | 2-s2.0-85061433461 | - |
dc.type.rims | ART | - |
dc.citation.volume | 9 | - |
dc.citation.issue | 2 | - |
dc.citation.publicationname | AIP ADVANCES | - |
dc.identifier.doi | 10.1063/1.5082862 | - |
dc.contributor.localauthor | Park, Jozeph | - |
dc.contributor.nonIdAuthor | Jang, Seong Cheol | - |
dc.contributor.nonIdAuthor | Kim, Hyoung-Do | - |
dc.contributor.nonIdAuthor | Hong, Hyunmin | - |
dc.contributor.nonIdAuthor | Chung, Kwun-Bum | - |
dc.contributor.nonIdAuthor | Kim, Yong Joo | - |
dc.contributor.nonIdAuthor | Kim, Hyun-Suk | - |
dc.description.isOpenAccess | Y | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | STABILITY | - |
dc.subject.keywordPlus | DENSITY | - |
dc.subject.keywordPlus | PAPER | - |
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