Browse "EE-Theses_Master(석사논문) " by Subject Amorphous boron nitride▼aback-end of-line▼acapping layer▼acopper interconnect▼alow-k▼aRC delay
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| (A) study on the applicability of amorphous boron nitride as a capping layer in Cu interconnect = 구리 배선에서 캡핑층으로서 비정질 질화 붕소의 활용 가능성에 대한 연구link Kim, Ki Ryong; Cho, Byung Jin; et al, 한국과학기술원, 2023 |
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