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NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
원자층 단위 증착법으로 증착된 TiN 증착기구에 대한 모델 연구 = A study of the deposition model about ALD (atomic layer deposition) TiN methodlink

박진성; Park, Jin-Seong; 강상원; Kang, Sang-Won, 한국과학기술원, 1999

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