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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Journal Papers(저널논문)

Effect of a TiO2 buffer layer on the CV properties of Pt/PbTiO3/TiO2/Si structure

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dc.contributor.authorByun, Cko
dc.contributor.authorKim, YIko
dc.contributor.authorLee, Won-Jongko
dc.contributor.authorLee, BWko
dc.date.accessioned2011-09-19T05:25:38Z-
dc.date.available2011-09-19T05:25:38Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued1997-04-
dc.identifier.citationJAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, v.36, no.9A , pp.5588 - 5589-
dc.identifier.urihttp://hdl.handle.net/10203/25233-
dc.description.abstractMetal/ferroelectric/insulator/semiconductor (MFIS) capacitors were prepared by depositing PbTiO3 and TiO2 layers on Si(100) wafers at 450 and 550 degrees C using metal organic chemical vapor deposition (MOCVD). The C-V properties of the capacitors depend on the quality of TiO2 films and TiO2/Si interfaces. The TiO2 film could serve as an effective buffer layer against the Pb diffusion and provide good C-V properties as long as it was deposited at proper substrate temperature with proper thickness.-
dc.languageEnglish-
dc.language.isoen_USen
dc.publisherJAPAN J APPLIED PHYSICS-
dc.subjectFILMS-
dc.titleEffect of a TiO2 buffer layer on the CV properties of Pt/PbTiO3/TiO2/Si structure-
dc.typeArticle-
dc.identifier.wosidA1997YE80400038-
dc.identifier.scopusid2-s2.0-0031224355-
dc.type.rimsART-
dc.citation.volume36-
dc.citation.issue9A-
dc.citation.beginningpage5588-
dc.citation.endingpage5589-
dc.citation.publicationnameJAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS-
dc.embargo.liftdate9999-12-31-
dc.embargo.terms9999-12-31-
dc.contributor.localauthorLee, Won-Jong-
dc.contributor.nonIdAuthorByun, C-
dc.contributor.nonIdAuthorKim, YI-
dc.contributor.nonIdAuthorLee, BW-
dc.type.journalArticleArticle-
dc.subject.keywordAuthorMFIS-
dc.subject.keywordAuthorferroelectrics-
dc.subject.keywordAuthorthin film-
dc.subject.keywordAuthorPbTiO3-
dc.subject.keywordAuthorTiO2-
dc.subject.keywordAuthorMOCVD-
dc.subject.keywordAuthorC-V-
dc.subject.keywordPlusFILMS-
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