Adhesion and wear properties of TiN films deposited on martensitic stainless steel and Stellite by reactive magnetron sputter ion plating

Abstract

TiN films were deposited onto the turbine blade materials, AISI 403 martensitic stainless steel and Stellite 6B, using reactive magnetron sputter ion plating. The hardness of the TiN film increases with the residual compressive stress and has a maximum value of 3400 kg/mm(2) at the substrate bias of about -75 V. In the scratch adhesion test, the critical loads for cohesive failure and adhesive failure are sensitively covered by the film hardness. The wear rate decreases with increasing hardness and has a minimum Value at about -75 V. The ion plated TiN has a superior wear resistance than the bare Stellite 6B and AISI 403 martensitic stainless steel. (C) 1998 Elsevier Science B.V.