DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, DC | ko |
dc.contributor.author | Lee, Won-Jong | ko |
dc.date.accessioned | 2011-09-15 | - |
dc.date.available | 2011-09-15 | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2002-03 | - |
dc.identifier.citation | JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.41, no.3A, pp.1470 - 1476 | - |
dc.identifier.issn | 0021-4922 | - |
dc.identifier.uri | http://hdl.handle.net/10203/25192 | - |
dc.description.abstract | The polarization hysteresis characteristics of Pb(Zi,Ti)O-3 (PZT) capacitors with a Pt top electrode are degraded by annealing in a hydrogen-containing environment due to the catalytic effect of Pt. This degradation can be avoided by adopting an LaNiO3 (LNO) conductive film as a top electrode. The LNO film does not act as a catalyst for the dissociation of hydrogen molecules and it is also a good diffusion barrier to the hydrogen molecules. The resistance of the LNO film to hydrogen degradation is further enhanced by inserting a thin Pt layer between the LNO and PZT films due to the blocking ability of Pt against the out-diffusion of the Pb component from the PZT film. The polarization characteristics of LNO/Pt/PZT/Pt capacitors are well preserved after hydrogen annealing even at 400degreesC for 30 min. The use of the LNO film as a top electrode also has a significant effect on improving the fatigue property of PZT capacitors. | - |
dc.description.sponsorship | This research was supported by the Center for Electronic Packaging Materials of Korea Science and Engineering Foundation. | en |
dc.language | English | - |
dc.language.iso | en_US | en |
dc.publisher | INST PURE APPLIED PHYSICS | - |
dc.subject | THIN-FILM | - |
dc.subject | DEGRADATION | - |
dc.title | Effect of LaNiO3 top electrode on the resistance of Pb(Zr,Ti)O-3 ferroelectric capacitor to hydrogen damage and fatigue | - |
dc.type | Article | - |
dc.identifier.wosid | 000176451500051 | - |
dc.identifier.scopusid | 2-s2.0-0036509268 | - |
dc.type.rims | ART | - |
dc.citation.volume | 41 | - |
dc.citation.issue | 3A | - |
dc.citation.beginningpage | 1470 | - |
dc.citation.endingpage | 1476 | - |
dc.citation.publicationname | JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS | - |
dc.embargo.liftdate | 9999-12-31 | - |
dc.embargo.terms | 9999-12-31 | - |
dc.contributor.localauthor | Lee, Won-Jong | - |
dc.contributor.nonIdAuthor | Kim, DC | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | Pb(Zr,Ti)O-3 | - |
dc.subject.keywordAuthor | LaNiO3 | - |
dc.subject.keywordAuthor | hydrogen damage | - |
dc.subject.keywordAuthor | hysteresis characteristics | - |
dc.subject.keywordAuthor | fatigue | - |
dc.subject.keywordPlus | THIN-FILM | - |
dc.subject.keywordPlus | DEGRADATION | - |
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