DC Field | Value | Language |
---|---|---|
dc.contributor.author | LEE, WG | ko |
dc.contributor.author | Woo, Seong-Ihl | ko |
dc.contributor.author | KIM, JC | ko |
dc.contributor.author | CHOI, SH | ko |
dc.contributor.author | OH, KH | ko |
dc.date.accessioned | 2019-03-08T00:55:09Z | - |
dc.date.available | 2019-03-08T00:55:09Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1993-11 | - |
dc.identifier.citation | APPLIED PHYSICS LETTERS, v.63, no.18, pp.2511 - 2513 | - |
dc.identifier.issn | 0003-6951 | - |
dc.identifier.uri | http://hdl.handle.net/10203/250999 | - |
dc.description.abstract | PbTiO3 thin films on the Si substrates were prepared by plasma enhanced chemical vapor deposition (PECVD) using Ti(O-i-C3H7)4, Pb(C2H5)4, and oxygen. The composition of PECVD PbTiO3 thin films was intensively influenced by the input flow rate ratio of precursors while it was independent of the deposition temperatures. As-deposited PECVD PbTiO3 thin film showed a uniform distribution of the Pb, Ti, and C component throughout the bulk of film. When an annealing process was performed at 750-degrees-C under the 02 ambient for 1 h, the Pb/(Pb+Ti) ratio of thin films was reduced from 0.567 to 0.509. | - |
dc.language | English | - |
dc.publisher | AMER INST PHYSICS | - |
dc.subject | LASER ABLATION | - |
dc.title | COMPOSITIONAL CONTROL OF PBTIO3 THIN-FILMS BY PLASMA-ENHANCED METALORGANIC CHEMICAL-VAPOR-DEPOSITION | - |
dc.type | Article | - |
dc.identifier.wosid | A1993MD96000020 | - |
dc.type.rims | ART | - |
dc.citation.volume | 63 | - |
dc.citation.issue | 18 | - |
dc.citation.beginningpage | 2511 | - |
dc.citation.endingpage | 2513 | - |
dc.citation.publicationname | APPLIED PHYSICS LETTERS | - |
dc.identifier.doi | 10.1063/1.110465 | - |
dc.contributor.localauthor | Woo, Seong-Ihl | - |
dc.contributor.nonIdAuthor | LEE, WG | - |
dc.contributor.nonIdAuthor | KIM, JC | - |
dc.contributor.nonIdAuthor | CHOI, SH | - |
dc.contributor.nonIdAuthor | OH, KH | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | LASER ABLATION | - |
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