DC Field | Value | Language |
---|---|---|
dc.contributor.author | Yokoyama, Masafumi | ko |
dc.contributor.author | Nishi, Koichi | ko |
dc.contributor.author | Kim, Sanghyeon | ko |
dc.contributor.author | Yokoyama, Haruki | ko |
dc.contributor.author | Takenaka, Mitsuru | ko |
dc.contributor.author | Takagi, Shinichi | ko |
dc.date.accessioned | 2019-02-20T04:58:30Z | - |
dc.date.available | 2019-02-20T04:58:30Z | - |
dc.date.created | 2019-02-07 | - |
dc.date.issued | 2014-03 | - |
dc.identifier.citation | APPLIED PHYSICS LETTERS, v.104, no.9 | - |
dc.identifier.issn | 0003-6951 | - |
dc.identifier.uri | http://hdl.handle.net/10203/250289 | - |
dc.description.abstract | We demonstrate self-aligned Ni-GaSb alloy source/drain (S/D) junctions for GaSb p-channel metal-oxide-semiconductor field-effect transistors (p-MOSFETs). Ni-GaSb alloys are used as self-aligned S/D junctions for GaSb p-MOSFETs formed with low-temperature annealing at 250 degrees C. Low-temperature process is preferred to avoid temperature-induced problems, because GaSb MOS gate stacks can show better MOS interface properties with lowering process temperature. This low-temperature S/D formation allowed us to realize the normal transistor operation of GaSb p-MOSFETs. Ni-GaSb alloy junctions can show the low contact resistivity with shallow junction depth. Self-aligned Ni-GaSb alloy S/D junctions can be an appropriate S/D junction technology for GaSb p-MOSFETs. (C) 2014 AIP Publishing LLC. | - |
dc.language | English | - |
dc.publisher | AMER INST PHYSICS | - |
dc.title | Self-aligned Ni-GaSb source/drain junctions for GaSb p-channel metal-oxide-semiconductor field-effect transistors | - |
dc.type | Article | - |
dc.identifier.wosid | 000332729200106 | - |
dc.identifier.scopusid | 2-s2.0-84896744236 | - |
dc.type.rims | ART | - |
dc.citation.volume | 104 | - |
dc.citation.issue | 9 | - |
dc.citation.publicationname | APPLIED PHYSICS LETTERS | - |
dc.identifier.doi | 10.1063/1.4867262 | - |
dc.contributor.nonIdAuthor | Yokoyama, Masafumi | - |
dc.contributor.nonIdAuthor | Nishi, Koichi | - |
dc.contributor.nonIdAuthor | Yokoyama, Haruki | - |
dc.contributor.nonIdAuthor | Takenaka, Mitsuru | - |
dc.contributor.nonIdAuthor | Takagi, Shinichi | - |
dc.description.isOpenAccess | N | - |
dc.type.journalArticle | Article | - |
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