Change in reflectance spectrum of nanoporous silicon by gas adsorption

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dc.contributor.authorKim, Young-Youko
dc.contributor.authorLee, Jeong-Hwako
dc.contributor.authorAhn, Eun-Junko
dc.contributor.authorKim, Han-Jungko
dc.date.accessioned2019-01-23T06:54:17Z-
dc.date.available2019-01-23T06:54:17Z-
dc.date.created2019-01-21-
dc.date.issued2019-01-
dc.identifier.citationPHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES, v.105, pp.25 - 28-
dc.identifier.issn1386-9477-
dc.identifier.urihttp://hdl.handle.net/10203/250106-
dc.description.abstractIn this paper, we propose a new strategy to improve the performance of nanoporous silicon (np-Si) layer-based optical gas sensors. For this, we fabricated the np-Si layer on a p(+)-type silicon substrate and modified the surface wettability of the np-Si layer with oxygen (O-2) plasma treatment. We then compared the changes in the reflectance spectra of the O-2 plasma-treated np-Si layer that had been exposed to various organic vapors with that of the untreated np-Si layer. The results by measuring the contact angle on the surface confirmed that the surface of the O-2 plasma-treated np-Si layer was hydrophilic. During the exposure to the organic vapors, there was a reversible red-shift phenomenon in the reflectance spectrum. This study confirmed that the red-shift can be attributed to the changes in the refractive index induced by the capillary condensation of the organic vapor within the nanopores of the np-Si layer. The changes in the reflectance spectra of the hydrophilic-treated np-Si layer were more noticeable than those in the untreated np-Si layer. These experimental results indicate that hydrophilic surface treatment can improve the selectivity and sensitivity of np-Si layer-based gas sensors.-
dc.languageEnglish-
dc.publisherELSEVIER SCIENCE BV-
dc.titleChange in reflectance spectrum of nanoporous silicon by gas adsorption-
dc.typeArticle-
dc.identifier.wosid000454899600005-
dc.identifier.scopusid2-s2.0-85053482319-
dc.type.rimsART-
dc.citation.volume105-
dc.citation.beginningpage25-
dc.citation.endingpage28-
dc.citation.publicationnamePHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES-
dc.identifier.doi10.1016/j.physe.2018.08.029-
dc.contributor.nonIdAuthorKim, Young-You-
dc.contributor.nonIdAuthorLee, Jeong-Hwa-
dc.contributor.nonIdAuthorAhn, Eun-Jun-
dc.description.isOpenAccessN-
dc.type.journalArticleArticle-
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