Design and fabrication of scanning mirror for laser display

Abstract

A 1500 mum x 1200 mum silicon scanning mirror for laser display has been designed and fabricated by deep inductively coupled plasma reactive ion etching (ICPRIE) and flip chip bonding technology. It is a vertically driven electrostatic scanner and composed of two structures having vertical comb fingers. The upper structure is composed of a scanning mirror plate, two torsion bars, a supporting frame and vertical comb fingers. The lower structure is composed of vertical comb fingers, a supporting frame, gold signal lines and pads on the Pyrex glass substrate. The comb fingers are etched by ICPRIE and assembled by flip chip aligner bonder. This scanning mirror can be used for laser display as a galvanometric vertical scanner. (C) 2002 Elsevier Science B.V. All rights reserved.