Scheduling of Dual-armed Cluster Tools with 2-cyclic Chamber Cleaning Operations
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 이태경 | ko |
| dc.contributor.author | 이태억 | ko |
| dc.date.accessioned | 2018-11-12T04:43:17Z | - |
| dc.date.available | 2018-11-12T04:43:17Z | - |
| dc.date.created | 2018-11-05 | - |
| dc.date.issued | 2018-04-05 | - |
| dc.identifier.citation | 2018춘계공동학술대회 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/246484 | - |
| dc.language | English | - |
| dc.publisher | 대한산업공학회 | - |
| dc.title | Scheduling of Dual-armed Cluster Tools with 2-cyclic Chamber Cleaning Operations | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | 2018춘계공동학술대회 | - |
| dc.identifier.conferencecountry | KO | - |
| dc.identifier.conferencelocation | 호텔현대 경주 | - |
| dc.contributor.localauthor | 이태억 | - |
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