DC Field | Value | Language |
---|---|---|
dc.contributor.author | Shin, H | ko |
dc.contributor.author | Choi, S | ko |
dc.contributor.author | Hwang, T | ko |
dc.contributor.author | Lee, Kwyro | ko |
dc.date.accessioned | 2011-07-12T01:15:56Z | - |
dc.date.available | 2011-07-12T01:15:56Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1998-11 | - |
dc.identifier.citation | JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.33, pp.175 - 178 | - |
dc.identifier.issn | 0374-4884 | - |
dc.identifier.uri | http://hdl.handle.net/10203/24575 | - |
dc.description.abstract | High-quality very thin films (less than or equal to 6 nm) of silicon nitride were thermally grown in ammonia atmosphere with an IR (Infrared) gold image furnace. As-grown nitride film was analyzed using AES (Auger Emission Spectroscopy). Using MIS (Metal-Insulator-Semiconductor) devices, the growth rate was calculated using CV (Capacitance-Voltage) measurements and various electrical characteristics were obtained using CV, IV (Current-Voltage), trapping, time-dependent breakdown, high-field stress, constant current injection stress and dielectric breakdown techniques. These characteristics showed that very thin thermal silicon nitride films can be used as gate dielectrics for future highly scaled-down ULSI (Ultra Large Scale Integrated) devices, especially for EEPROM (Electrically Erasable and Programmable ROM)'s. | - |
dc.language | English | - |
dc.language.iso | en_US | en |
dc.publisher | KOREAN PHYSICAL SOC | - |
dc.title | Thermally grown thin nitride films as a gate dielectric | - |
dc.type | Article | - |
dc.identifier.wosid | 000077308900030 | - |
dc.identifier.scopusid | 2-s2.0-0032261802 | - |
dc.type.rims | ART | - |
dc.citation.volume | 33 | - |
dc.citation.beginningpage | 175 | - |
dc.citation.endingpage | 178 | - |
dc.citation.publicationname | JOURNAL OF THE KOREAN PHYSICAL SOCIETY | - |
dc.embargo.liftdate | 9999-12-31 | - |
dc.embargo.terms | 9999-12-31 | - |
dc.contributor.localauthor | Shin, H | - |
dc.contributor.localauthor | Lee, Kwyro | - |
dc.contributor.nonIdAuthor | Choi, S | - |
dc.contributor.nonIdAuthor | Hwang, T | - |
dc.type.journalArticle | Article; Proceedings Paper | - |
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