Design optimization for an SOI MOEMS accelerometer

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dc.contributor.authorTeo, Adrian J. T.ko
dc.contributor.authorLi, Holden King-Hoko
dc.contributor.authorTan, Say Hwako
dc.contributor.authorYoon, Yong-Jinko
dc.date.accessioned2018-09-18T06:39:23Z-
dc.date.available2018-09-18T06:39:23Z-
dc.date.created2018-09-10-
dc.date.created2018-09-10-
dc.date.created2018-09-10-
dc.date.issued2018-01-
dc.identifier.citationMICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, v.24, no.1, pp.465 - 472-
dc.identifier.issn0946-7076-
dc.identifier.urihttp://hdl.handle.net/10203/245715-
dc.description.abstractWith optimization being vital, the design optimization of a silicon-on-insulator (SOI) micro-opto-electro-mechanical systems accelerometer is discussed in this paper. This process has enabled a simplistic design that employs double-sided deep reactive ion etching (DRIE) on SOI wafer to be able to attain high sensitivity of 294 A mu W/G with a calculated proof mass displacement of 0.066 A mu m/G which was close to ANSYS simulated results of 0.061 A mu m/G. Optimization has also enabled an in-depth study of the effects of the different variables on the overall performance of the device.-
dc.languageEnglish-
dc.publisherSPRINGER-
dc.subjectMEMS-
dc.subjectSILICON-
dc.titleDesign optimization for an SOI MOEMS accelerometer-
dc.typeArticle-
dc.identifier.wosid000423320800050-
dc.identifier.scopusid2-s2.0-85040978383-
dc.type.rimsART-
dc.citation.volume24-
dc.citation.issue1-
dc.citation.beginningpage465-
dc.citation.endingpage472-
dc.citation.publicationnameMICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS-
dc.identifier.doi10.1007/s00542-017-3370-4-
dc.contributor.localauthorYoon, Yong-Jin-
dc.contributor.nonIdAuthorTeo, Adrian J. T.-
dc.contributor.nonIdAuthorLi, Holden King-Ho-
dc.contributor.nonIdAuthorTan, Say Hwa-
dc.description.isOpenAccessN-
dc.type.journalArticleArticle-
dc.subject.keywordPlusMEMS-
dc.subject.keywordPlusSILICON-
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