DC Field | Value | Language |
---|---|---|
dc.contributor.author | Choi, Jungkeun | ko |
dc.contributor.author | Kim, Seokbeom | ko |
dc.contributor.author | Lee, Jungchul | ko |
dc.contributor.author | Choi, Bumkyoo | ko |
dc.date.accessioned | 2018-09-18T05:53:55Z | - |
dc.date.available | 2018-09-18T05:53:55Z | - |
dc.date.created | 2018-08-21 | - |
dc.date.created | 2018-08-21 | - |
dc.date.issued | 2015-08 | - |
dc.identifier.citation | IEEE SENSORS JOURNAL, v.15, no.8, pp.4180 - 4181 | - |
dc.identifier.issn | 1530-437X | - |
dc.identifier.uri | http://hdl.handle.net/10203/245460 | - |
dc.description.abstract | This letter reports sensitivity-improved capacitive pressure sensors fabricated using liquid alloy and highly compliant silicon elastomer. Multilayer elastomer layers prepared by replica moulding were stacked and bonded to form three isolated disk-shaped cavities whose diameters are 3 or 5 mm. Top and bottom cavities (both are 200-mu m tall) were filled with eutectic gallium-indium to realize compliant parallel electrodes. The cavity in the middle (1-mm tall) was left empty to make it compressed with applied pressure. The overall diameter and height of fabricated pressure sensors are 6 or 7.5 mm and 4 or 6 mm, respectively. After fabricated liquid alloy capacitive pressure sensors were connected with external inductors to construct LC resonant circuits, their resonance frequencies were characterized with applied pressures ranging from 0 to 10 kPa. We found that liquid-alloy capacitive pressure sensors exhibit improved sensitivities over identically sized sensors with solid electrodes. | - |
dc.language | English | - |
dc.publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC | - |
dc.subject | STRAIN SENSORS | - |
dc.subject | ELECTRONICS | - |
dc.title | Improved Capacitive Pressure Sensors Based on Liquid Alloy and Silicone Elastomer | - |
dc.type | Article | - |
dc.identifier.wosid | 000357802000004 | - |
dc.identifier.scopusid | 2-s2.0-84933576392 | - |
dc.type.rims | ART | - |
dc.citation.volume | 15 | - |
dc.citation.issue | 8 | - |
dc.citation.beginningpage | 4180 | - |
dc.citation.endingpage | 4181 | - |
dc.citation.publicationname | IEEE SENSORS JOURNAL | - |
dc.identifier.doi | 10.1109/JSEN.2015.2426718 | - |
dc.contributor.localauthor | Lee, Jungchul | - |
dc.contributor.nonIdAuthor | Choi, Jungkeun | - |
dc.contributor.nonIdAuthor | Kim, Seokbeom | - |
dc.contributor.nonIdAuthor | Choi, Bumkyoo | - |
dc.description.isOpenAccess | N | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | Capacitive pressure sensor | - |
dc.subject.keywordAuthor | eutectic gallium-indium (EGaIn) | - |
dc.subject.keywordAuthor | liquid alloy | - |
dc.subject.keywordAuthor | silicone elastomer | - |
dc.subject.keywordPlus | STRAIN SENSORS | - |
dc.subject.keywordPlus | ELECTRONICS | - |
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