주사 현미경용 평면 스캐너 Part 2 : 정,동 특성 평가

Abstract

this paper shows experimental evaluation results of the nano-positioning planner scanner used in the scanning probe microscope. The planar scanner is composed of flexure guides, piezoelectric actuators and feedback sensors as the static properties of the planar scanner, we evaluated the maximum travel range & crosstalk. Also, we presented the correcting method for crosstalk using electric circuits. Finally, as the dynamic properties of the planar scanner, we evaluated the first resonant frequency. Also, we presented the actual AFM imaging results with up 2Hz imaging scan rate. Experimental results show that properties of the proposed planar scanner are well enough to be used in SPM applications like AFM.