DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, Dong Yeon | - |
dc.contributor.author | Lee, Moo Yeon | - |
dc.contributor.author | Gweon, Dea Gab | - |
dc.date.accessioned | 2011-07-04T07:10:29Z | - |
dc.date.available | 2011-07-04T07:10:29Z | - |
dc.date.issued | 2005-10 | - |
dc.identifier.citation | 한국소음진동공학회논문집, Vol.15, No.11, pp.1295-1302 | en |
dc.identifier.uri | http://hdl.handle.net/10203/24394 | - |
dc.description.abstract | this paper shows experimental evaluation results of the nano-positioning planner scanner used in the scanning probe microscope. The planar scanner is composed of flexure guides, piezoelectric actuators and feedback sensors as the static properties of the planar scanner, we evaluated the maximum travel range & crosstalk. Also, we presented the correcting method for crosstalk using electric circuits. Finally, as the dynamic properties of the planar scanner, we evaluated the first resonant frequency. Also, we presented the actual AFM imaging results with up 2Hz imaging scan rate. Experimental results show that properties of the proposed planar scanner are well enough to be used in SPM applications like AFM. | en |
dc.language.iso | ko | en |
dc.publisher | 한국소음진동공학회 | en |
dc.subject | 나노 평면 스캐너 | en |
dc.subject | 유연 가이드 | en |
dc.subject | 압전 소자 구동기 | en |
dc.subject | 고유진동수 | en |
dc.subject | 주사 현미경 | en |
dc.subject | 원자현미경 | en |
dc.title | 주사 현미경용 평면 스캐너 Part 2 : 정,동 특성 평가 | en |
dc.title.alternative | A Flexure Guided Planar Scanner for Scanning Probe Microscope; Part2: Evaluation of Static and Dynamic Properties | en |
dc.type | Article | en |
dc.subject.alternative | Nano-Positioning Planar Scanner | en |
dc.subject.alternative | Flexure Guide | en |
dc.subject.alternative | Piezoelectric Autuator | en |
dc.subject.alternative | Natural Frequency | en |
dc.subject.alternative | Scanning Probe Microscope | en |
dc.subject.alternative | Atomic Force Microscope | en |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.