학위논문(석사) - 한국과학기술원 : 전기및전자공학부, 2017.8,[v, 52 p. :]
Capacitive Micromachined Ultrasonic Transducer(CMUT)▼aChemical sensor▼aLow voltage; Capacitive Micromachined Ultrasonic Transducer(CMUT)▼a화학 센서▼a저전압
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