Directional photofluidization mediated capillary force lithography = 빛에 의해 유도된 방향성을 갖는 유체화에 의한 모세관력 리쏘그라피

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furthermore, any structural modification from a mold pattern is quite challenging due to an difficulty in controlling the degree of fluidization by both heat and solvent. In this study, we introduce a new concept of capillary force lithography, termed directional photofluidization (DPF) CFL, which exploits the fluidization of polymer induced by simple far-field light exposure. The room temperature DPF-CFL process allows a pattern formulation in stable manner with avoiding any deformation issue of elastomeric mold. Furthermore, the degree of fluidization can be deterministically controlled by light, which provides unprecedented structural controllability in pattern height. As a proof-of-concept, azobenzene-containing material that shows directional photofluidic behavior is used as a pattern former, and various micro/nano structures in large area are successfully fabricated in fast manner by developing a light-irradiation protocol. The formation of multi-scale structure is also successfully demonstrated, ensuring its wide applicability to various applications.; Capillary force lithography (CFL) is an attractive lithography technique that can fabricate high-resolution pattern in large area and in simple manner. However, conventional CFL, where it uses heat or solvent to fluidize polymer, has issued that the applied heat or solvent incurs thermal expansion or deformation of elastomeric mold
Advisors
Kim, Hee-Takresearcher김희탁researcher
Description
한국과학기술원 :생명화학공학과,
Publisher
한국과학기술원
Issue Date
2016
Identifier
325007
Language
eng
Description

학위논문(석사) - 한국과학기술원 : 생명화학공학과, 2016.2,[vi, 34 p. :]

Keywords

Azopolymer; Capillary force lithography; Directional Photofluidization; Far-field light; Multi-scale structure; 아조고분자; 모세관력 리쏘그라피; 방향성을 갖는 유체화; 원거리장 빛; 멀티스케일 구조체

URI
http://hdl.handle.net/10203/243055
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=669202&flag=dissertation
Appears in Collection
CBE-Theses_Master(석사논문)
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