Electron Information in Single-and Dual-Frequency Capacitive Discharges at Atmospheric Pressure

Abstract

Determining the electron properties of weakly ionized gases, particularly in a high electron-neutral collisional condition, is a nontrivial task; thus, the mechanisms underlying the electron characteristics and electron heating structure in radio-frequency (rf) collisional discharges remain unclear. Here, we report the electrical characteristics and electron information in single-frequency (4.52 MHz and 13.56 MHz) and dual-frequency (a combination of 4.52 MHz and 13.56 MHz) capacitive discharges within the abnormal alpha-mode regime at atmospheric pressure. A continuum radiation-based electron diagnostic method is employed to estimate the electron density (n(e)) and temperature (T-e). Our experimental observations reveal that time-averaged ne (7.7-14 x 10(11) cm(-3)) and T-e (1.75-2.5 eV) can be independently controlled in dual-frequency discharge, whereas such control is nontrivial in single-frequency discharge, which shows a linear increase in ne and little to no change in T-e with increases in the rf input power. Furthermore, the two-dimensional spatiotemporal evolution of neutral bremsstrahlung and associated electron heating structures is demonstrated. These results reveal that a symmetric structure in electron heating becomes asymmetric (via a local suppression of electron temperature) as two-frequency power is simultaneously introduced.