학위논문(박사) - 한국과학기술원 : 기계공학전공, 2013.8,[vi, 89 p. :]
Magnetic levitation; Dual servo stage; Planar motor; Voice coil motor; High precision; 자기부상; 이중서보; 평면모터; 보이스코일모터; 고정밀
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